Published 1995
| Version v1
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Nitrogen loss of thin metal-nitride films due to heavy ion bombardment
- 1. New South Wales Univ., Kensington, NSW (Australia). School of Physics
- 2. Macquarie Univ., North Ryde, NSW (Australia)
- 3. Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
Description
Short communication
Files
28080416.pdf
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(21.2 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 7007.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28080416
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- HEAVY IONS; IODINE 127 BEAMS; ION BEAMS; IRRADIATION; METALS; MEV RANGE 10-100; NITRIDES; RUTHERFORD SCATTERING; SILICON OXIDES; SPUTTERING; STOICHIOMETRY; STRUCTURAL CHEMICAL ANALYSIS; TIME-OF-FLIGHT METHOD
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CHARGED PARTICLES; ELASTIC SCATTERING; ELEMENTS; ENERGY RANGE; IONS; MEV RANGE; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; SCATTERING; SILICON COMPOUNDS