Novel process concepts for the ion-beam sputtering

Published 2008 | Version v1

Journal article Metadata-only

no abstract available

Availability note (English)

Also available online: http://www.dpg-tagungen.de/index_en.html

Original title (German): Neuartige Prozesskonzepte fuer das Ionenstrahl-Zerstaeuben

Title: 2008 DPG spring meeting. Jointly spring meeting of the working group AMOP of the professional associations atomic physics, short time physics, mass spectrometry, molecule physics, plasma physics, quantum optics and photonics and the professional associations hadrons and cores, environmental physics
Original Conference Title: DPG Fruehjahrstagung 2008. Gemeinsame Fruehjahrstagung des Arbeitskreises AMOP mit den Fachverbaenden Atomphysik, Kurzzeitphysik, Massenspektrometrie, Molekuelphysik, Plasmaphysik, Quantenoptik und Photonik und den Fachverbaenden Hadronen und Kerne, Umweltphysik
Dates: 10-14 Mar 2008
Place: Darmstadt (Germany)

Country of Publication: Germany
Country of Input or Organization: Germany
INIS RN: 40031279
Subject category: S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator: Conference, No Abstract
Descriptors DEI: COATINGS; ENERGY BEAM DEPOSITION; ION BEAMS; ION COLLISIONS; LASER RADIATION; PHYSICAL RADIATION EFFECTS; PROCESSING; SILICON OXIDES; SPUTTERING; STABILITY; TITANIUM OXIDES
Descriptors DEC: BEAMS; CHALCOGENIDES; COLLISIONS; DEPOSITION; ELECTROMAGNETIC RADIATION; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; RADIATIONS; SILICON COMPOUNDS; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS