Development of low-cost, high-performance non-evaporable getter (NEG) pumps

Low-cost, high-performance non-evaporable getter (NEG) pumps were constructed using commercial NEG pills comprising 70 wt% Zr, 24.6 wt% V, and 5.4 wt% Fe, a conflat flange with an outer diameter of 70, 152, or 203 mm (DN 40 CF, DN 100 CF, and DN 160 CF, respectively), and a tantalum heater. After activation at 400 °C for 30 min, the pumping speeds of a DN 40 CF NEG pump measured with the orifice method were 47–40, 8–6, 24–17, and 19–15 L/s for H₂, N₂, CO, and CO₂ gasses, respectively. NEG pumps using DN 100 CF and DN 160 CF were also developed, and their pumping speeds are estimated. These NEG pumps are favorable alternatives to sputtering ion pumps in VSX beamlines because they do not produce hydrocarbons except during the activation period. The NEG pumps can also be used for accelerators, front ends, end stations, and differential pumping systems.