Characterization of Micro Structure, Morphology and Electrical Properties Barium Titanate (BT) Doping Sr by Chemical Solution Deposition (CSD)

Thin films successfully grown on the substrate Pt / Si is thin films BT doping Strontium (BST) by Chemical Solution Deposition (CSD) method. The percentage of doping Sr material are 1%, 3%, and 5%. The BST thin layer was characterized using X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and the hysteresis curve testing by Sawyer tower methods. The diffraction angle (2θ) in the XRD curve shifts to the right (bigger) along with increasing doping mol % Sr. Lattice parameters BST using the refinement GSAS program showed that a thin layer of BST has a tetragonal structure. From SEM analysis, along with increasing variation mol % Sr doping does not affect the thickness, but affects the grain size of a thin layer. BST thin layer of a ferroelectric material which has been formed mark a hysteresis curve. The characterization results to show that a thin layer of BST has been deposited on the substrate Pt/Si. (paper)