Published October 2006
| Version v1
Journal article
Study of proton irradiated p-type and n-type silicon wafers by method of an positron annihilation spectroscopy
- 1. Moskovskij Gosudarstvennyj Inst. Ehlektronnoj Tekhniki (MIEhT), Zelenograd, Moscow (Russian Federation)
- 2. FGUP GNTs RF Inst. Teoreticheskoj i Ehksperimental'noj Fiziki im. A.I. Alikhanova, Moscow (Russian Federation)
Description
Proton irradiated silicon wafers are investigated by means of positron spectroscopy (angular correlation of annihilation radiation, ACAR). Analysis of experimental ACAR spectra and their difference in irradiated and nonirradiated samples as well as the solution of the kinetic equations for formation, transformations and annihilation of the Wheeler positron states, allow for the first time, to measure concentration of radiation defects
Abstract (Russian)
Рассмотрены подходы, используемые для определения концентрации и структуры дефектов кремния методом позитронной аннигиляционной спектроскопии. Посредством измерения углового распределения аннигиляционных фотонов (УРАФ) исследован процесс аннигиляции позитронов в пластинах кремния, облученных протонами. Анализ кривых УРАФ облученных и необлученных образцов и решение кинетических уравнений образования, превращений и аннигиляции позитронных состояний позволило впервые определить концентрации радиационных дефектов в кремнииAdditional details
Additional titles
- Original title (Russian)
- Изучение методом позитронной аннигиляционной спектроскопии пластин кремния с различной обработкой поверхности
- Augmented title (English)
- radiation defects
Publishing Information
- Journal Title
- Poverkhnost'. Rentgenovskie, Sinkhrotronnye i Nejtronnye Issledovaniya
- Journal Issue
- no.10
- Journal Page Range
- p. 5-9
- ISSN
- 1028-0960
Conference
- Title
- 17. International conference On ion-surface interactions (ISI-2005)
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- 25-29 Aug 2005
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39021343
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNIHILATION; COMPARATIVE EVALUATIONS; CRYSTAL DEFECTS; ELECTRONS; PHYSICAL RADIATION EFFECTS; POSITRONS; PROTON BEAMS; SILICON; SPECTROSCOPY
- Descriptors DEC
- ANTILEPTONS; ANTIMATTER; ANTIPARTICLES; BEAMS; CRYSTAL STRUCTURE; ELEMENTARY PARTICLES; ELEMENTS; EVALUATION; FERMIONS; INTERACTIONS; LEPTONS; MATTER; NUCLEON BEAMS; PARTICLE BEAMS; PARTICLE INTERACTIONS; RADIATION EFFECTS; SEMIMETALS
Optional Information
- Notes
- 21 refs., 1 tab.