The fabrication of ReS2 flowers at controlled locations by chemical vapor deposition

Highlights: • The ReS2 flowers are grown on the substrate by a facile chemical vapor deposition method. • The ordered arrays of ReS2 flowers have been successfully prepared on SiO2/Si substrate using the Pt metal dots as nucleation sites. Here we report a metal induced nucleation to realize the growth of ReS₂ flowers at controlled locations. The ordered arrays of ReS₂ flowers have been successfully prepared on SiO₂/Si substrate using Pt metal dots as nucleation sites and S, NH₄ReO₄ powders as precursors by a chemical vapor depostion method. The NH₄ReO₄ powders are used as the rhenium sources. The ReS₂ flowers are grown above the pre-patterned Pt dots, Raman and transmission electron microscopy measurements indicated that the prepared ReS₂ flowers have excellent crystalline quality.