Thermal annealing of single crystal zirconia implanted with platinum ions
Creators
- 1. Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne 3000 (Australia)
- 2. Accelerator and Fusion Research Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720 (United States)
Description
Single crystal samples of (100) oriented cubic zirconia stabilised with 9.5 mol% yttria were implanted with platinum ions, using a metal vapour vacuum arc (MEVVA) high current ion implanter, to a nominal dose of 1x1017 ions/cm2. The implanted samples were annealed isothermally in air ambient at 400-1200 C, from 1 to 24 h. Rutherford backscattering spectrometry and channelling (RBSC) of 2 MeV He ions are employed to determine depth distributions of ion damage, Pt ions and substitutionality of Pt ions before and after annealing. As implanted samples do not show an amorphous phase, the retained dose is small, about 35% of the nominal dose, and the Pt depth profiles are sputter limited. Ion damage begins to anneal at 400 C and eventually recovers quite well at 1200 C, leading to the formation of partially coherent precipitates of Pt. Platinum shows a solid solubility of at least 13 mol.% in zirconia at 1200 C. At lower anneal temperatures, cubic zirconia may have transformed to monoclinic or tetragonal phases. ((orig.))
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 91
- Journal Issue
- 1-4
- Journal Page Range
- p. 280-283.
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 7. international conference on radiation effects in insulators (REI-7).
- Dates
- 6-10 Sep 1993.
- Place
- Nagoya (Japan).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 26019128
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMORPHOUS STATE; ANNEALING; BACKSCATTERING; CUBIC LATTICES; ELECTRIC ARCS; HELIUM IONS; ION IMPLANTATION; MEV RANGE 01-10; MONOCLINIC LATTICES; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; PLATINUM IONS; PRECIPITATION; RADIATION DOSES; RUTHERFORD SCATTERING; SOLID SOLUTIONS; SOLUBILITY; SPUTTERING; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; TEMPERATURE RANGE 1000-4000 K; ZIRCONIUM OXIDES
- Descriptors DEC
- CHALCOGENIDES; CHARGED PARTICLES; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CRYSTALS; CURRENTS; DISPERSIONS; ELASTIC SCATTERING; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ENERGY RANGE; HEAT TREATMENTS; HOMOGENEOUS MIXTURES; IONS; MEV RANGE; MIXTURES; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; SCATTERING; SEPARATION PROCESSES; SOLUTIONS; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS