Published 1974
| Version v1
Book
The basic principles of ion implantation
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Academic Press.
- Imprint Place
- London
- ISBN
- 0121683508
- Imprint Title
- Science and technology of surface coating
- Imprint Pagination
- p. 404-410.
Conference
- Title
- A NATO Advanced Study Institute on the science and technology of surface coating.
- Dates
- Apr 1972.
- Place
- London, UK.
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 6191439
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRIC CONTACTS; ION IMPLANTATION; SEMICONDUCTOR MATERIALS; SURFACE COATING
- Descriptors DEC
- DEPOSITION; ELECTRICAL EQUIPMENT