Published May 2004
| Version v1
Journal article
Real-time X-ray diffraction studies of surface structure during metalorganic chemical vapor deposition
- 1. NTT Basic Research Laboratories, Atsugi, Kanagawa (Japan)
- 2. Himeji Inst. of Technology, Hyogo (Japan)
Description
Reconstructed surface structure and real-time surface structure analyses were performed by using an in situ synchrotron radiation undulator X-ray diffractometer combining a goniometer and a MOCVD growth system. The P-rich InP(001) surface grown by MOCVD has a (2 x 1) super-structure, which consists of P-dimers. The real-time surface structure monitoring shows the relationship between the supply rate of gaseous sources and surface structures, and surface structure changing. (author)
Additional details
Publishing Information
- Journal Title
- Oyo Butsuri
- Journal Volume
- 73
- Journal Issue
- 5
- Journal Page Range
- p. 620-623
- ISSN
- 0369-8009
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 35069492
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; INDIUM PHOSPHIDES; METALS; MONITORING; ORGANIC COMPOUNDS; REAL TIME SYSTEMS; STRUCTURAL CHEMICAL ANALYSIS; SURFACES; SYNCHROTRON RADIATION; X-RAY DIFFRACTION
- Descriptors DEC
- BREMSSTRAHLUNG; CHEMICAL COATING; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELEMENTS; INDIUM COMPOUNDS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; RADIATIONS; SCATTERING; SURFACE COATING
Optional Information
- Notes
- 12 refs., 5 figs.