Published 2020 | Version v1
Journal article Metadata-only

Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon

Creators

  • 1. INESC-TEC – Technology and Science, Rua do Campo Alegre, 4169-007, Porto (Portugal)
  • 2. IFIMUP-IN – Institute for Nanoscience and Nanotechnology, Rua do Campo Alegre, 4169-007, Porto (Portugal)
  • 3. INESC-MN – Microsystems and Nanotechnologies, Rua Alves Redol, 1000-029 Lisboa (Portugal)

Description

To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film with a magneto strictive coefficient of λ S ~ 55 p.p.m. The experimental configuration uses a laser and a position sensitive detector to measure the displacement, based on an optical lever configuration, and a piezoelectric stage to calibrate the system. Key words: Magnetostriction / Thin films / Micromechanical & nanomechanical oscillators / Functional Materials / Evaporation / Bending

Availability note (English)

Available from https://www.epj-conferences.org/articles/epjconf/pdf/2020/09/epjconf_cmpnc2019_05003.pdf; https://doaj.org/article/a024642cdb614eacb7e19e7473970b6b

Additional details

Identifiers

URL
https://www.epj-conferences.org/articles/epjconf/pdf/2020/09/epjconf_cmpnc2019_05003.pdf; https://doaj.org/article/a024642cdb614eacb7e19e7473970b6b;
DOI
10.1051/epjconf/202023305003;

Publishing Information

Journal Title
EPJ. Web of Conferences
Journal Volume
233
Journal Page Range
vp.
ISSN
2100-014X

Conference

Title
Portuguese Condensed Matter Physics National Conference
Acronym
CMPNC 2019
Dates
8-10 May 2019
Place
Porto (Portugal)

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
53093049
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BENDING; COMPUTER CODES; COMPUTERIZED SIMULATION; CONFIGURATION; ELECTRON BEAMS; EVAPORATION; HYDROGENATION; LASERS; MACHINING; MAGNETIC FIELDS; MAGNETOSTRICTION; MATERIALS; OSCILLATORS; PHYSICAL VAPOR DEPOSITION; PIEZOELECTRICITY; POSITION SENSITIVE DETECTORS; SILICON; SURFACES; THIN FILMS
Descriptors DEC
BEAMS; CHEMICAL REACTIONS; DEFORMATION; DEPOSITION; ELECTRICITY; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; LEPTON BEAMS; MAGNETIC PROPERTIES; MEASURING INSTRUMENTS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; RADIATION DETECTORS; SEMIMETALS; SIMULATION; SURFACE COATING