The performance study of a toroidal angle and energy dispersive multichannel electron energy spectrometer

In this article, we reported the study on the performance of a spectrometer based on a TEEA which could detect the electrons outgoing in the plane perpendicular to the incident electron beam in a wide azimuth angle range of 245 degree simultaneously. The energy resolution, energy linearity and energy window of the spectrometer were studied systematically by experiment, and the influence of the voltages on the electrodes of the input lens and output lens were investigated. Further discussion on the energy resolution was carried out. The influence of the axial asymmetry was quantitatively investigated, and a calibration method was proposed. These studies are significant to this spectrometer for its further development and for its usage on energy spectroscopy of surface at microscale. (authors)