Published 1995 | Version v1
Miscellaneous Open

Ion mass dependence of normalized regrowth rates in MeV ion beam induced epitaxial crystallization

  • 1. Osaka National Research Institute, AIST, Ikeda, Osaka, (Japan)

Description

Short communication

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Part of:
Ninth international conference on ion beam modification of materials. Book of abstracts

Additional details

Publishing Information

Publisher
Accademic Press.
Imprint Title
Ninth international conference on ion beam modification of materials. Book of abstracts
Imprint Pagination
452 p.
Journal Page Range
p. 10035.
Report number
INIS-AU--0004

Conference

Title
9. international conference on ion beam modification of materials.
Acronym
IBMM'95
Dates
5-10 Feb 1995.
Place
Canberra (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
28080487
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CHANNELING; EPITAXY; GERMANIUM IONS; HELIUM IONS; ION IMPLANTATION; MEV RANGE 01-10; RECRYSTALLIZATION; SILICON
Descriptors DEC
CHARGED PARTICLES; CRYSTAL GROWTH METHODS; ELEMENTS; ENERGY RANGE; IONS; MEV RANGE; SEMIMETALS

Optional Information