Published February 2009 | Version v1
Journal article

Optical properties of vacuum ultraviolet and deep ultraviolet region substrate materials

  • 1. National Synchrotron Radiation Laboratory, Univ. of Science and Technology of China, Hefei (China)
  • 2. Shanghai Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai (China)
  • 3. Jiangsu Laboratory of Advanced Functional Materials, Changshu Inst. of Technology, Changshu (China)

Description

To furnish a greater choice of substrate materials for application in vacuum ultraviolet and deep ultraviolet region, the optical properties of several substrate materials such as JGS1, MgF2 , CaF2, and LiF are studied in the wavelength region from 120 nm to 300 nm. The optical constants of these materials are determined from photometric measurements through a process of matching calculated and measured values of the reflectance and transmittance in the ultraviolet to deep ultraviolet region. A method to calculate optical properties of weak absorption substrates is introduced. (authors)

Additional details

Publishing Information

Journal Title
High Power Laser and Particle Beams
Journal Volume
21
Journal Issue
2
Journal Page Range
p. 287-290
ISSN
1001-4322

Optional Information

Notes
8 figs., 1 tab., 11 refs.