Published 2012 | Version v1
Journal article

Optimization of the electrostatic structure of the ion microprobe

  • 1. Institute of Applied Physics, Sumy (Ukraine)

Description

The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 x mrad2 x MeV. To achieve higher microprobe resolution it is intended to place an electrostatic lens between the collimators and the accelerating tube.

Additional details

Additional titles

Original title (Russian)
Оптимизация электростатической системы ионного микрозонда

Publishing Information

Journal Title
Yaderna Fyizika ta Energetika
Journal Issue
v.13/1
Journal Page Range
p. 97-100
ISSN
1818-331X