Fabrication and Characterization of Transparent Piezoresistors Using Carbon Nanotube Film
- 1. Korea Advanced Institute of Science and Technology, Daejeon (Korea, Republic of)
- 2. Korea Institute of Standards and Science, Daejeon (Korea, Republic of)
Description
We present the fabrication and characterization of transparent carbon nanotube film (CNF) piezoresistors. CNFs were fabricated by vacuum filtration methods with 65.92% transmittance and patterned on Au-deposited silicon wafer by photolithography and dry etching. The patterned CNFs were transferred onto poly-dimethysiloxane (PDMS) using the weak adhesion property between the silicon wafer and the Au layer. The transferred CNFs were confirmed to be piezoresistors using the equation of concentrated-force-derived resistance change. The gauge factor of the CNFs was measured to range from 10 to 20 as the resistance of the CNFs increased with applied pressure. In polymer microelectromechanical systems, CNF piezoresistors are the promising materials because of their high sensitivity and low-temperature process
Additional details
Publishing Information
- Journal Title
- Transactions of the Korean Society of Mechanical Engineers. A
- Journal Volume
- 34
- Journal Issue
- 12
- Series
- 14 refs, 5 figs, 1 tab
- Journal Page Range
- p. 1857-1863
- ISSN
- 1226-4873
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 43121248
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY; S42: ENGINEERING;
- Descriptors DEI
- EQUATIONS; ETCHING; FABRICATION; FILTRATION; NANOTUBES
- Descriptors DEC
- NANOSTRUCTURES; SEPARATION PROCESSES; SURFACE FINISHING