Published 2021 | Version v1
Book Metadata-only

Influence of pulse frequency on the structure and properties of Ta-Si-N coatings

Creators

  • 1. NITU «MISiS», Moscow (Russian Federation)

Description

In this work, the Ta-Si-N coatings were deposited by the pulsed magnetron sputtering at a pulse frequency of 5, 50, and 350 kHz. The structure, mechanical properties, and oxidation resistance of the coatings at 1200 °C were studied. The optimal deposition mode was determined from the point of view of providing a combination of high mechanical characteristics and oxidation resistance

Abstract (Russian)

В работе методом импульсного магнетронного распыления были получены покрытия Ta-Si-N при частоте импульсов 5, 50 и 350 кГц. Изучены структура, механические свойства и стойкость покрытий к окислению при 1200 °C. Был определен оптимальный режим осаждения с точки зрения обеспечения совокупности высоких механических характеристик и жаростойкости
Part of:
VII International conference «Laser, plasma research and technologies» LaPlaz-2021. Collection of scientific papers. Part 1

Additional details

Additional titles

Original title (Russian)
Влияние частоты импульсов на структуру и свойства покрытий Та-Си-Н

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-2767-2
Imprint Title
VII International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies#Right-Pointing Double Angle Quotation Mark# LaPlaz-2021. Collection of scientific papers. Part 1
Imprint Pagination
460 p.
Journal Page Range
p. 321-322

Conference

Title
VII International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies#Right-Pointing Double Angle Quotation Mark# LaPlaz-2021
Original Conference Title
VII Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2021
Dates
23-26 Mar 2021
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
55088119
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; CHEMICAL COMPOSITION; COMPARATIVE EVALUATIONS; MAGNETRONS; MECHANICAL PROPERTIES; MICROSTRUCTURE; PROTECTIVE COATINGS; PULSES; REFRACTORIES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TANTALUM NITRIDES; TANTALUM SULFIDES; X-RAY DIFFRACTION
Descriptors DEC
CHALCOGENIDES; COATINGS; COHERENT SCATTERING; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; EVALUATION; HEAT TREATMENTS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; REFRACTORY METAL COMPOUNDS; SCATTERING; SULFIDES; SULFUR COMPOUNDS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
4 refs. Imprint:VII Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#Lazernye, plazmennye issledovaniya i tekhnologii#Right-Pointing Double Angle Quotation Mark# LaPlaz-2021. Sbornik nauchnykh trudov. Chast' 1