Published April 2010 | Version v1
Journal article

Dust grain charging in RF discharges

  • 1. Blackett Laboratory, Imperial College London, Prince Consort Road, London, SW7 2BZ, UK, EU (United Kingdom)

Description

In this work modifications of the orbital motion limited approach are used to investigate the impact of time varying phenomena on the floating potential of a dust grain. The main interest is focused on different regimes relevant for RF discharges. Three cases are considered. First, the case of the RF sheath. Second, the case of charging in the bulk plasma with a time varying electric field and third, the case when the time varying current in the bulk plasma is carried only by a fraction of the electron population. This last case is relevant to low pressure discharges when stochastic heating is important.

Availability note (English)

Available from http://dx.doi.org/10.1088/0963-0252/19/2/025002

Additional details

Identifiers

DOI
10.1088/0963-0252/19/2/025002;
PII
S0963-0252(10)34534-8;

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
19
Journal Issue
2
Journal Page Range
[11 p.]
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
41058528
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
CURRENTS; DUSTS; ELECTRIC FIELDS; ELECTRONS; MODIFICATIONS; PLASMA; POPULATIONS; POTENTIALS; STOCHASTIC PROCESSES
Descriptors DEC
ELEMENTARY PARTICLES; FERMIONS; LEPTONS