Published 1996 | Version v1
Book Metadata-only

New hard multilayers on the basis of the system To-Al-C-N obtained by PECVD

Creators

  • 1. Technische Univ. Dresden (Germany)

Description

The metastable phases (Ti,Al)N and (Ti,Al)C have been deposited using a pulsed DC-discharge and a reproducible multilayer process comprising (Ti,Al)N was realized. The influence of the multilayer formation on layer structure and stress was investigated. By multilayer deposition a decrease of stress and an increase of adhesion can be achieved. Further characterization results are given. (author). 3 refs., 2 figs., 1 Photo

Part of:
Trends and new applications in thin films

Additional details

Publishing Information

Publisher
Societe Francaise du Vide.
Imprint Place
Paris (France)
Imprint Title
Trends and new applications in thin films
Imprint Pagination
298 p.
Journal Page Range
p. 82-84.

Conference

Title
5. International Symposium on Trends and New Applications in Thin Films.
Dates
1-3 Apr 1996.
Place
Colmar (France).

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
28000319
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ADHESION; ALUMINIUM CARBIDES; ALUMINIUM NITRIDES; CATHODE SPUTTERING; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; FCC LATTICES; LATTICE PARAMETERS; LAYERS; MICROHARDNESS; MICROSTRUCTURE; PLASMA ARC SPRAYING; THIN FILMS; TITANIUM CARBIDES; TITANIUM NITRIDES; VAPOR DEPOSITED COATINGS
Descriptors DEC
ALUMINIUM COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CHEMICAL COATING; COATINGS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CUBIC LATTICES; DEPOSITION; FILMS; HARDNESS; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SPRAY COATING; SPUTTERING; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information