An EpoClad/EpoCore-based platform for MOEMS fabrication

EpoClad and EpoCore are the photopatternable epoxies with slightly different refractive indices that were developed to create optical waveguides. In this paper, we present a simple, robust and flexible fabrication platform for micro-opto-electro-mechanical systems applications based on these materials. EpoClad and EpoCore are used for the cladding and core layers of integrated optical waveguides, respectively, as well as for the surrounding mechanical framework that includes a built-in fiber clamping system that allows both horizontal and vertical clamping of optical fibers. The transmission properties of various waveguide configurations are studied. Then, both mechanical and thermal modulators of optical transmission are investigated. A tunable in-plane hydrogel microlens setup is then shown that further demonstrates the concept of the proposed optical platform. (paper)