Simulation of Mass Interferences Considering Charge Exchange Events and Dissociation of Molecular Ions During Extraction

Contamination due to mass interferences generally leads to severe problems in ion implantation. To be able to prevent this kind of contamination, the cause of the respective mass interference has to be known. Frequently, however, the transport mechanisms of the contamination are unknown and the search for potential transport mechanisms is troublesome. Simulation of mass interferences, therefore, is an excellent means to find potential transport mechanisms. In this paper, the simulation software ENCOTION (ENergetic COntamination simulaTION) is explained. In the latest version, an enhanced model was implemented in order to calculate the apparent mass of ions. The relevance of the new model is discussed by the example of tungsten contamination in the case of BF2+ implants. A new module that allows for the simulation of mass spectra was recently added to ENCOTION as a new feature.