Published 2005 | Version v1
Book Metadata-only

The study of the ion beam induced swelling in crystalline germanium irradiated by a 30 keV Ga+ focused ion beam

Creators

  • 1. Microanalytical Research Centre, School of Physics, Melbourne University, Melbourne, VIC (Australia)
  • 2. Electron Microscope Unit, New South Wales University, Sydney, NSW (Australia)

Description

The effect of swelling of crystalline Ge irradiated at room temperature with 30 keV Ga+ focused ion beam (FIB) was studied by means of in situ FIB imaging, atomic force microscopy (AFM) and transmission electron microscopy (TEM). The swelling occurred in the surface region of amorphous damage layer which was formed during ion irradiation. The degree of swelling reaches values up to 10 times for an implantation dose of ∼1017 ions/cm2. Cross-secitonal TEM examination showed that the swelling is due to formation of a porous layer with a honeycomb structure. (author). 8 refs., 4 figs

Additional details

Publishing Information

Publisher
The Conference
Imprint Place
Wellington (New Zealand)
ISBN
0-9758434-0-0
Imprint Title
14th Australian Conference on Nuclear and Complementary Techniques of Analysis and 8th Vacuum Society of Australia Congress : Te Papa Museum, Wellington, New Zealand, 20-22 November 2005 : proceedings
Imprint Pagination
321 p.
Journal Page Range
p. 223-226

Conference

Title
14. Australian Conference on Nuclear and Complementary Techniques of Analysis; 8. Vacuum Society of Australia Congress
Dates
20-22 Nov 2005
Place
Wellington (New Zealand)

INIS

Country of Publication
New Zealand
Country of Input or Organization
New Zealand
INIS RN
38062714
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ATOMIC FORCE MICROSCOPY; GERMANIUM; ION BEAMS; IRRADIATION; SWELLING; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
BEAMS; DEFORMATION; ELECTRON MICROSCOPY; ELEMENTS; METALS; MICROSCOPY