Microstructures for physics and chemistry experiments

For the past 15 years we have been using integrated circuit (IC) technology to fabricate targets and diagnostic devices for physics and chemistry experiments at LLNL. Some of the features that make this technology attractive for this purpose are: the advanced state of computer aided design which makes arrays and design variation possible, the ability to print and etch feature sizes in the micron and sub-micron range, the purity of the materials used, the ample supply of equipment and procedures associated with the IC industry. Examples of the more popular devises include x-ray transmissive windows, diffraction grating, Fresnel zone plates, resolution and alignment targets, small apertures, laser targets, field emission points, and microchannel coolers. This paper discusses the fabrication of these devices and show several examples