Redesign of analyzer magnet on ion implanter using superfish and opera-3D simulator

Redesign of analyzer magnet on ion implanter using superfish and opera-3D simulator has been done. In order for the implanted ions on a target is a single ion a magnetic analyzer is needed. The magnetic analyzer can separate some impurity ions from accelerated ion beams to produce a single ion beams. Ion implanter in PTAPB has been equipped with a magnetic analyzer, but the design details data were not available and the functions still were not optimal so that it will hamper for maintenance and development. The purpose of this activity is to obtain a document containing technical information and to optimize a magnetic analyzer design. To achieve these objectives, the activities initiated by searching for references related to the magnetic analyzer, perform detailed calculation with considering the existing parameters, simulation of the design that has been made, determination of design parameters and optimization of the designs. From this activity can be obtained a detailed design document of magnetic analyzer for 150 keV particle energy with 60° bending angle and the ability to separate particles with m / z = 8 amu. While the optimization of the previous design can be done by changing the shape of C-type magnetic core into H type, change the shape of the magnetic pole into a square with the position of incoming beam makes a positive θ angle and inclined to the edge of the magnetic poles. (author)