Published June 7, 2006 | Version v1
Journal article

Asymptotic x-ray scattering from highly mismatched epitaxial films

  • 1. Paul-Drude-Institut fuer Festkoerperelektronik, Hausvogteiplatz 5-7, 10117 Berlin (Germany)
  • 2. Institute of Physics, Polish Academy of Sciences, aleja Lotnikow 32/46, 02-668 Warsaw (Poland)

Description

We study x-ray diffraction peak profiles from highly mismatched relaxed epitaxial films at momentum transfers exceeding the peak widths. Calculated profiles for misfit dislocations are compared with triple-crystal diffraction profiles from GaAs/Si(001) epitaxial films. We find that the longitudinal and transverse scans have a common q-4 asymptote but approach it differently, so that their profiles are qualitatively different in the experimentally available momentum range. The possible contribution from threading dislocations is estimated

Availability note (English)

Available online at http://stacks.iop.org/0953-8984/18/5047/cm6_22_005.pdf or at the Web site for the Journal of Physics. Condensed Matter (ISSN 1361-648X) http://www.iop.org/

Additional details

Publishing Information

Journal Title
Journal of Physics. Condensed Matter
Journal Volume
18
Journal Issue
22
Journal Page Range
p. 5047-5055
ISSN
0953-8984
CODEN
JCOMEL