Published 2004 | Version v1
Miscellaneous Metadata-only

Development of micro-machined heat flux sensor by using MEMS technology

Creators

  • 1. Pohang Univ. of Science and Technology, Pohang (Korea, Republic of)
  • 2. KAERI, Taejon (Korea, Republic of)

Description

New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena

Part of:
Proceedings of the KSME 2004 spring annual meeting

Additional details

Publishing Information

Publisher
KSME
Imprint Place
Seoul (Korea, Republic of)
Imprint Title
Proceedings of the KSME 2004 spring annual meeting
Imprint Pagination
[CD-ROM]
Journal Page Range
[6 p.]

Conference

Title
2004 spring annual meeting of the KSME
Dates
28-30 Apr 2004
Place
Pyeongchang (Korea, Republic of)

INIS

Country of Publication
Korea, Republic of
Country of Input or Organization
Korea, Republic of
INIS RN
35090036
Subject category
S42: ENGINEERING;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
CALIBRATION; CONVECTION; COPPER; DESIGN; FABRICATION; HEAT FLUX; HEAT TRANSFER; LAYERS; NICKEL; SENSITIVITY; SPUTTERING
Descriptors DEC
ELEMENTS; ENERGY TRANSFER; HEAT TRANSFER; MASS TRANSFER; METALS; TRANSITION ELEMENTS

Optional Information

Notes
12 refs, 6 figs, 3 tabs