Published August 31, 2013 | Version v1
Journal article

Nondestructive mapping of chemical composition and structural qualities of group III-nitride nanowires using submicron beam synchrotron-based X-ray diffraction

  • 1. Georgia Institute of Technology/GTL, UMI 2958 Georgia Tech-CNRS, 57070 Metz (France)
  • 2. LMOPS + UMI: Laboratoire Matériaux Optiques, Photonique et micro-nano Systèmes, UMR CNRS 7132, Université de Metz et SUPELEC, 2 rue E. Belin, 57070 Metz, France, UMI 2958 Georgia Tech-CNRS, 57070 Metz (France)
  • 3. UMI 2958 Georgia Tech-CNRS, 57070 Metz (France)
  • 4. Department of Physics, New Jersey Institute of Technology, Newark, NJ 07102 (United States)
  • 5. Cornell High Energy Synchrotron Source (CHESS), Cornell University, Ithaca, NY 14853 (United States)
  • 6. Advanced Photon Source, 9700 S. Cass Avenue, Argonne, IL 60439 (United States)
  • 7. Laboratoire de Photonique et de Nanostructures, UPR CNRS 20, Route de Nozay, 91460 Marcoussis (France)
  • 8. Laboratoire d'Etude des Textures et Application aux Matériaux UMR CNRS 7078 Ile du Saulcy 57045 METZ cedex 1 (France)
  • 9. Laboratoire de Physique des Milieux Ionisés et Applications, Nancy University, CNRS, BP 239, F-54506 Vandoeuvre-lès-Nancy Cédex (France)

Description

Submicron beam synchrotron-based X-ray diffraction (XRD) techniques have been developed and used to accurately and nondestructively map chemical composition and material quality of selectively grown group III-nitride nanowires. GaN, AlGaN, and InGaN multi-quantum-well nanowires have been selectively grown on lattice matched and mismatched substrates, and the challenges associated with obtaining and interpreting submicron beam XRD results are addressed and solved. Nanoscale cathodoluminescence is used to examine exciton behavior, and energy-dispersive X-ray spectroscopy is used to verify chemical composition. Scanning transmission electron microscopy is later used to paint a more complete picture. The advantages of submicron beam XRD over other techniques are discussed in the context of this challenging material system. - Highlights: ► We used nano selective area growth to create nanowires of GaN, AlGaN and InGaN/GaN. ► We characterized them by synchrotron-based submicron beam X-ray diffraction (XRD). ► This technique accurately determined chemical and crystallographic properties. ► Challenges of XRD are addressed in the context of this challenging material system. ► Advantages of XRD over other characterization methods are discussed

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2012.12.099

Additional details

Identifiers

DOI
10.1016/j.tsf.2012.12.099;
PII
S0040-6090(13)00025-4;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
541
Journal Page Range
p. 46-50
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
Current trends in optical and X-ray metrology of advanced materials for nanoscale devices III
Acronym
E-MRS spring meeting, symposium W
Dates
14-18 May 2012
Place
Strasbourg (France)

INIS

Optional Information

Copyright
Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.