Published July 26, 1999 | Version v1
Journal article Metadata-only

Properties of BaxSr1-xTiO3 films grown by the method of HF magnetron sputtering on sapphire with a SrTiO3 sublayer

Creators

  • 1. Gosudarstvennyj Ehlektrotekhnicheskij Univ., Sankt-Peterburg (Russian Federation)

Description

The results of experiments on sputtering the strontium-barium titanate films on the sapphire substrates with a strontium titanate sublayer are presented. It is shown that application of the sublayer makes it possible to obtain weak temperature dependence of the films dielectric properties within a wide range of temperatures. The ferroelectric films parameters correspond thereby to the assigned requirements

Abstract (Russian)

Приведены результаты экспериментов по нанесению пленок титаната стронция-бария на подложки сапфира с подслоем титаната стронция. Показано, что использование подслоя позволяет добиться слабой температурной зависимости диэлектрических свойств пленок в широком интервале температур. При этом параметры сегнетоэлектрических пленок соответствуют уровню предъявляемых требованиий

Additional details

Additional titles

Original title (Russian)
Свойства пленок Ба

Publishing Information

Journal Title
Pis'ma v Zhurnal Tekhnicheskoj Fiziki
Journal Volume
25
Journal Issue
14
Journal Page Range
p. 1-5
ISSN
0320-0116
CODEN
PZTFDD

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
33012361
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BARIUM COMPOUNDS; DIELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; GRAIN ORIENTATION; MAGNETRONS; SAPPHIRE; SOLID SOLUTIONS; SPUTTERING; STRONTIUM TITANATES; SUBSTRATES; THIN FILMS; VAPOR DEPOSITED COATINGS
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; COATINGS; CORUNDUM; DIELECTRIC MATERIALS; DISPERSIONS; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; HOMOGENEOUS MIXTURES; MATERIALS; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MINERALS; MIXTURES; ORIENTATION; OXIDE MINERALS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SOLUTIONS; STRONTIUM COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
4 refs., 2 figs., 1 tab.