Published 1999
| Version v1
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Investigation of TiN-coatings produced with a planar vacuum-arc plasma source
Creators
- 1. NNTs 'Khar'kovskij fiziko-tekhnicheskij institut', Khar'kov (Ukraine)
Description
The inverse-translational motion (scanning) at the Ti-plasma flows generated with planar vacuum-arc source have been investigated. This motion effect on the characteristies of TiN coatings was studied at different pressures of nitrogen, cathode-substrate distances, arc currents, negative bias voltages and substrate temperatures. The character of thickness distributions, phase composition, microhardness and also erosion internals of the coating were determined
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Additional details
Additional titles
- Original title (Russian)
- Исследование TiN покрытий, полученных с помощью электро-дугового планарного источника
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 173 p.
- Journal Page Range
- p. 16-21
- Report number
- INIS-UA--071(V.1)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 1.
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 1
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051648
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANGULAR DISTRIBUTION; CATHODE SPUTTERING; CORROSION RESISTANCE; MICROHARDNESS; PLASMA ARC SPRAYING; SUBSTRATES; THICKNESS; TITANIUM IONS; TITANIUM NITRIDES; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- CHARGED PARTICLES; COATINGS; DEPOSITION; DIMENSIONS; DISTRIBUTION; HARDNESS; IONS; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SPRAY COATING; SPUTTERING; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3