Performance of three variants of micro-gap chambers

Measurements with variants of micro-gap chambers built on silicon wafers are reported: - we compare the ability of the detectors to sustain high voltage on the cathodes for two fabrication processes; - we present results on the measurement of the second coordinate with small stereo angle cathodes and for two kinds of insulating layer on the silicon; - we discuss a first attempt to build a one-dimensional micro-gap chamber with a single metal layer. (orig.)