Published March 1981
| Version v1
Journal article
Effect of hydrogen gas on c-axis oriented AIN films prepared by reactive magnetron sputtering
- 1. Toyama Technical Coll. (Japan). Faculty of Electrical Engineering
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Jpn. J. Appl. Phys.
- Journal Volume
- 20
- Journal Issue
- 3
- Series
- Jpn. J. Appl. Phys.
- Journal Page Range
- L169-L172
- ISSN
- 0021-4922
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 14739324
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ALUMINIUM NITRIDES; COATINGS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRON MICROSCOPY; FILMS; GASES; GLASS; HYDROGEN; NITROGEN; SPUTTERING; TRANSMISSION
- Descriptors DEC
- ALUMINIUM COMPOUNDS; ELEMENTS; FLUIDS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; NONMETALS
Optional Information
- Notes
- Published in summary form only.