Published 1974 | Version v1
Report Restricted

TSC measurements on boron implanted silicon junctions

  • 1. Centre National de la Recherche Scientifique, 67 - Strasbourg (France). Lab. de Physique des Rayonnements et d'Electronique Nucleaire

Description

no abstract available

Availability note (English)

MF available from INIS under the Report Number.

Files

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Additional details

Publishing Information

Imprint Pagination
12 p.
Report number
AED-Conf--74-328-001

Conference

Title
International conference on lattice defects in semiconductors.
Dates
22 Jul 1974.
Place
Freiburg im Breisgau, F.R. Germany.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
6169755
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; BORON; CRYSTAL DEFECTS; DOPED MATERIALS; ELECTRIC CURRENTS; ION IMPLANTATION; KEV RANGE; N-TYPE CONDUCTORS; SEMICONDUCTOR JUNCTIONS; SILICON; SOLIDS; TEMPERATURE DEPENDENCE
Descriptors DEC
CRYSTAL STRUCTURE; CURRENTS; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; SEMICONDUCTOR MATERIALS; SEMIMETALS

Optional Information

Notes
6 figs.; with refs. With abstract.