Published March 1, 2017
| Version v1
Journal article
Tools for modeling radioactive contaminants in chip materials
- 1. Université de Montpellier, UMR-CNRS 5214, 860 rue de Saint Priest, F-34095 Montpellier (France)
- 2. Vanderbilt University, Nashville, TN 37235 (United States)
- 3. Laboratoire souterrain de Modane (LSM), UMR F-6417 (France)
- 4. ICP-MS Laboratory of Géosciences Montpellier, Université de Montpellier (France)
Description
Radioactive pollutants are naturally present in microelectronic device materials and can be an issue for the reliability of devices. The main concern is alpha emitters that produce high-energy particles (a few MeV) that ionize the semiconductor and then trigger soft errors. The question is to know what kinds of radionuclides are present in the device, their location in the device and the abundance of each species. In this paper we describe tools that are required to address the issue of radioactive pollutants in electronic devices. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6641/aa5479Additional details
Identifiers
Publishing Information
- Journal Title
- Semiconductor Science and Technology
- Journal Volume
- 32
- Journal Issue
- 3
- Journal Page Range
- [8 p.]
- ISSN
- 0268-1242
- CODEN
- SSTEET
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 49087602
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ABUNDANCE; ALPHA SOURCES; ELECTRONIC EQUIPMENT; ERRORS; MEV RANGE 01-10; MICROELECTRONICS; RADIOACTIVE WASTES; RADIOISOTOPES; SEMICONDUCTOR MATERIALS; SIMULATION; TOOLS
- Descriptors DEC
- ENERGY RANGE; EQUIPMENT; ION SOURCES; ISOTOPES; MATERIALS; MEV RANGE; PARTICLE SOURCES; RADIATION SOURCES; RADIOACTIVE MATERIALS; WASTES