Published May 26, 2006 | Version v1
Journal article

Improved UV emission of zinc oxide through hyrogen doping in pulse-modulated high-power ICP

  • 1. National Institute for Materials Science, Advanced Materials Laboratory, Namiki 1-1, Tsukuba-shi, Ibaraki 305-0044 (Japan)
  • 2. Tokyo University of Science, Department of Pure and Applied Chemistry, Yamazaki, Noda-shi, Chiba 278-8510 (Japan)

Description

Pulse-modulated high-power inductively coupled plasma (PM-ICP) as a radical source of high flux density was utilized to improve the UV emission efficiency of ZnO. The irradiation of argon-hydrogen PM-ICP plasma gave the improvement of the UV emission at 380 nm. The relationship between the treatment condition and the emission properties was examined with respect to hydrogen dissolution. When treated in the tail plasma flame with adequate cooling, the specimen showed the intense UV emission. The control of heat flux by mixing nitrogen gas to the hydrogen-containing plasma also had a favorable influence on the UV emission

Additional details

Identifiers

DOI
10.1016/j.tsf.2005.08.270;
PII
S0040-6090(05)01342-8;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
506-507
Journal Page Range
p. 303-306
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
Joint meeting of 7. APCPST (Asia Pacific conference on plasma science and technology) and 17. SPSM (symposium on plasma science for materials)
Dates
29 Jun - 2 Jul 2004
Place
Fukuoka (Japan)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
38004623
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON; EMISSION; FLUX DENSITY; HEAT FLUX; HYDROGEN; IRRADIATION; NITROGEN; PLASMA; PULSES; ZINC OXIDES
Descriptors DEC
CHALCOGENIDES; ELEMENTS; FLUIDS; GASES; NONMETALS; OXIDES; OXYGEN COMPOUNDS; RARE GASES; ZINC COMPOUNDS

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.