Published March 1992
| Version v1
Journal article
Direct laser synthesis of thin silicon and germanium nitride/oxynitride layers
Creators
- 1. Inst. of Atomic Physics, Bucharest (Romania)
- 2. Dept. of Physics, Univ. of Lecce (Italy)
- 3. Dept. of Materials Science, Univ. of Lecce (Italy)
Description
α-Si3N4 layers have been directly grown on a silicon surface as an effect of excimer (XeCl*) laser irradiation of silicon wafers in a NH3 atmosphere. The chemical composition corresponded to a mixture of polycrystalline silicon and pure Si3N4. By laser irradiation of germanium samples or of silicon samples in N2 atmosphere, only a thin oxynitride layer with low N concentration is obtained. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B
- Journal Volume
- 65
- Journal Issue
- 1-4
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 115-118
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 6. conference on radiation effects in insulators.
- Dates
- 24-28 Jun 1991.
- Place
- Weimar (Germany).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23070307
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMMONIA; CHEMICAL COMPOSITION; ELECTRON DIFFRACTION; EXCIMER LASERS; GERMANIUM; GERMANIUM NITRIDES; LASER RADIATION; LAYERS; NUCLEAR REACTION ANALYSIS; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON NITRIDES; SILICON OXIDES; SYNTHESIS; TEMPERATURE RANGE 1000-4000 K; THIN FILMS; TRANSMISSION ELECTRON MICROSCO
- Descriptors DEC
- AMPLIFIERS; CHALCOGENIDES; CHEMICAL ANALYSIS; COHERENT SCATTERING; CRYSTALS; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; EQUIPMENT; FILMS; GAS LASERS; GERMANIUM COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; LASERS; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; NITROGEN HYDRIDES; NONDESTRUCTIVE ANALYSIS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; RADIATIONS; SCATTERING; SEMIMETALS; SILICON COMPOUNDS; TEMPERATURE RANGE