Published October 1988 | Version v1
Journal article Open

BROOKHAVEN: The chips are down

Creators

Description

no abstract available

Availability note (English)

Also available on-line: http://cds.cern.ch/record/1731583/files/vol28-issue8-p028-e.pdf

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Additional details

Additional titles

Augmented title (English)
Lithography with X-rays

Publishing Information

Journal Title
CERN Courier
Journal Volume
28
Journal Issue
8
Journal Page Range
p. 28-31
ISSN
0304-288X
CODEN
CECOA2

INIS

Country of Publication
European Organization for Nuclear Research (CERN)
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
46040778
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
FABRICATION; INTEGRATED CIRCUITS; NSLS; SPATIAL RESOLUTION; SYNCHROTRON RADIATION; X RADIATION; X-RAY SOURCES
Descriptors DEC
BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; IONIZING RADIATIONS; MICROELECTRONIC CIRCUITS; RADIATION SOURCES; RADIATIONS; RESOLUTION; SYNCHROTRON RADIATION SOURCES

Optional Information

Notes
This record replaces 20003406
Secondary number(s)
INIS-XC-J--88C0088