Published October 1988
| Version v1
Journal article
Open
BROOKHAVEN: The chips are down
Creators
Description
no abstract available
Availability note (English)
Also available on-line: http://cds.cern.ch/record/1731583/files/vol28-issue8-p028-e.pdfFiles
46040778.pdf
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Additional details
Additional titles
- Augmented title (English)
- Lithography with X-rays
Identifiers
Publishing Information
- Journal Title
- CERN Courier
- Journal Volume
- 28
- Journal Issue
- 8
- Journal Page Range
- p. 28-31
- ISSN
- 0304-288X
- CODEN
- CECOA2
INIS
- Country of Publication
- European Organization for Nuclear Research (CERN)
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46040778
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- FABRICATION; INTEGRATED CIRCUITS; NSLS; SPATIAL RESOLUTION; SYNCHROTRON RADIATION; X RADIATION; X-RAY SOURCES
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; IONIZING RADIATIONS; MICROELECTRONIC CIRCUITS; RADIATION SOURCES; RADIATIONS; RESOLUTION; SYNCHROTRON RADIATION SOURCES
Optional Information
- Notes
- This record replaces 20003406
- Secondary number(s)
- INIS-XC-J--88C0088