The preparation of ZnO based gas-sensing thin films by ink-jet printing method

An ink-jet printing technique was applied to prepare ZnO based gas-sensing thin films. ZnO inks with appropriate viscosity and surface tension were prepared by sol-gel techniques, and printed onto substrates using a commercial printer. After the drying and heating treatment processes, continuous ZnO films were formed and studied by scanning electron microscopy, X-ray diffraction and by a home-made gas sensitivity measuring system. It was found that the morphology and electrical properties of the films changed significantly with the thickness of the films, which can be adjusted simply by printing on the film with increasing frequency. Highest resistance and sensitivity to acetone vapor were obtained when the film was prepared by printing only once on it. Different dopants with certain concentrations could be added into the films by printing with different dopant inks and printing frequency. All Pd, Ag, and ZrO2 dopants increased both the resistivity and the sensitivity of the films (180 ppm acetone). This work showed that the ink-jet printing technique was a convenient and low cost method to prepare films with controlled film thickness and dopant concentration