MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements

A capacitive force sensor for in situ transmission electron microscope (TEM)-nanoindentation with simultaneous force and current measurement has been developed. The sensor was fabricated using bulk micro machining methods such as deep reactive ion etch, thermal oxidation, metal deposition and anodic bonding. Two different geometries of the sensor were designed to allow in situ TEM electromechanical experiments in the most common TEM instruments. Electrical probing is enabled by an on-chip insulator, electrically separating the indenter tip and the capacitor used for force measurements. The sensor was designed for the force range of 0 to 4.5 mN. Finally, we demonstrate for the first time in situ TEM-nanoindentation with simultaneous force and current measurements.