Development of CMOS sensors with digital pixels for the ILD vertex detector

This thesis presents the development of CMOS pixel sensors (CPS) integrated with pixel- level ADCs for the outer layers of the ILD (International Large Detector) vertex detector. Driven by physics in the ILC (International Linear Collider), an unprecedented precision is required for the detectors. The priority of the sensors mounted on the outer layers is low power consumption due to the large coverage ratio of the sensitive area (∼90%) in the vertex detector. The CPS integrated with ADCs is a promising candidate for this application. The architecture of column-level ADCs, exists but do not provide an optimized performance in terms of noise and power consumption. The concept of pixel-level ADCs has been proposed. Benefiting from the all-digital pixel outputs, pixel-level ADCs exhibit the obvious merits on noise, speed, insensitive area, and power consumption. In this thesis, a prototype sensor, called MIMADC, has been implemented by a 0.18 μm CIS (CMOS Image Sensor) process. The target of this sensor is to verify the feasibility of the CPS integrated with pixel-level ADCs. Three matrices are included in this prototype but with two different types of pixel-level ADCs: one with successive approximation register (SAR) ADCs, and the other two with single-slope (SS) ADCs. All of them feature a same pixel size of 35x35 μm² and a resolution of 3-bit. In this thesis, the prototype is presented for both theoretical analyses and circuit designs. The test results of the prototype are also presented. (author)