Published January 1974
| Version v1
Journal article
Electronmicroscopic evidence for a columnar-void-type structure in sputtered NbN films
Creators
- 1. Cornell University, Bard Hall, Ithaca, New York 14850
Description
Transmission electron microscopy of sputtered NbN films shows that the films contain columnar grains with an average axial diameter of 100 Å or less. A large number of narrow (≈ 20 Å) voids separate most of the grains. The voids extend through the film and are probably responsible for the strong pinning observed in these films. The high resistivity and relatedly the high upper critical field values of the films are also believed to be due to this columnar-void structure.
Additional details
Identifiers
- DOI
- 10.1063/1.1663003;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 45
- Journal Issue
- 1
- Series
- J. Appl. Phys.
- Journal Page Range
- 465-466
- ISSN
- 0021-8979
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 5135125
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- CRITICAL FIELD; ELECTRON MICROSCOPY; FILMS; GRAIN BOUNDARIES; GRAIN GROWTH; MAGNETIC FLUX; NIOBIUM NITRIDES; SPUTTERING; STAINLESS STEELS; SUPERCONDUCTIVITY; ULTRAHIGH VACUUM; VOIDS
- Descriptors DEC
- ALLOYS; CHROMIUM ALLOYS; CORROSION RESISTANT ALLOYS; CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; IRON ALLOYS; IRON BASE ALLOYS; MAGNETIC FIELDS; MICROSCOPY; MICROSTRUCTURE; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; STEELS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent