Accurate hydrogen depth profiling by reflection elastic recoil detection analysis

A technique to convert reflection elastic recoil detection analysis spectra to depth profiles, the channel-depth conversion, was introduced by Verda et al. [Nucl. Instr. and Meth. B 183 (2001) 401]. But the channel-depth conversion does not correct for energy spread, the unwanted broadening in the energy of the spectra, which can lead to errors in depth profiling. A work in progress introduces a technique that corrects for energy spread in elastic recoil detection analysis spectra, the energy spread correction [Nucl. Instr. and Meth. B 187 (2002) 383]. Together, the energy spread correction and the channel-depth conversion comprise an accurate and convenient hydrogen depth profiling method