Published 2000 | Version v1
Miscellaneous

Silicon epitaxy on porous silicon

  • 1. Instytut Technologii Materialow Elektronicznych, Warsaw (Poland)
  • 2. Instytut Mikroelektroniki i Optoelektroniki, Politechnika Warszawska, Warsaw (Poland)
  • 3. Instytut Technologii Elektronowej, Warsaw (Poland)

Description

no abstract available

Part of:
Abstracts book of 7. Scientific Conference 'Electronic Technology' ELTE 2000

Additional details

Additional titles

Original title (Polish)
Epitaksja krzemu na krzemie porowatym

Publishing Information

Imprint Title
Abstracts book of 7. Scientific Conference 'Electronic Technology' ELTE 2000
Imprint Pagination
[RP 1-9; RS 1; ME 1-78; MN 1-58; F 1-73; TP 1-48; MG 1-16; MS 1-51]
Journal Page Range
p. ME, 12

Conference

Title
7. Scientific Conference 'Electronic Technology' ELTE 2000
Original Conference Title
7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000
Dates
18-22 Sep 2000
Place
Polanica-Zdroj (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
32031628
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY; EPITAXY; MANUFACTURING; POROUS MATERIALS; SILICON; THIN FILMS
Descriptors DEC
CHEMICAL COATING; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; MATERIALS; PHYSICAL PROPERTIES; SEMIMETALS; SURFACE COATING

Optional Information

Notes
1 ref Imprint:Zbior streszczen 7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000