Published 2000
| Version v1
Miscellaneous
Silicon epitaxy on porous silicon
- 1. Instytut Technologii Materialow Elektronicznych, Warsaw (Poland)
- 2. Instytut Mikroelektroniki i Optoelektroniki, Politechnika Warszawska, Warsaw (Poland)
- 3. Instytut Technologii Elektronowej, Warsaw (Poland)
Description
no abstract available
Additional details
Additional titles
- Original title (Polish)
- Epitaksja krzemu na krzemie porowatym
Publishing Information
- Imprint Title
- Abstracts book of 7. Scientific Conference 'Electronic Technology' ELTE 2000
- Imprint Pagination
- [RP 1-9; RS 1; ME 1-78; MN 1-58; F 1-73; TP 1-48; MG 1-16; MS 1-51]
- Journal Page Range
- p. ME, 12
Conference
- Title
- 7. Scientific Conference 'Electronic Technology' ELTE 2000
- Original Conference Title
- 7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000
- Dates
- 18-22 Sep 2000
- Place
- Polanica-Zdroj (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32031628
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY; EPITAXY; MANUFACTURING; POROUS MATERIALS; SILICON; THIN FILMS
- Descriptors DEC
- CHEMICAL COATING; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; MATERIALS; PHYSICAL PROPERTIES; SEMIMETALS; SURFACE COATING
Optional Information
- Notes
- 1 ref Imprint:Zbior streszczen 7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000