Published May 1981 | Version v1
Journal article Metadata-only

Ion implantation

Creators

  • 1. AN Litovskoj SSR, Vilnyus. Inst. Fiziki

Description

In the popular science article principles of ion implantation, essence of channelling effect and distribution of implanted ions are treated. Advantages and disadvantages of ion implantation as compared to diffusion doping are considered

Additional details

Additional titles

Original title (Lithuanian)
Jonu implantacija

Publishing Information

Journal Title
Mokslas Tech.
Journal Volume
5
Series
Mokslas Tech.
Journal Page Range
16-17

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
13676489
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
CRYSTALS; ION CHANNELING; ION IMPLANTATION; SEMICONDUCTOR MATERIALS; SPATIAL DISTRIBUTION
Descriptors DEC
CHANNELING; DISTRIBUTION