Published April 1988
| Version v1
Journal article
A Study on the Thickness Measurement of Thin Film by Ultrasonic Wave
Creators
- 1. Hanyang University, Seoul (Korea, Republic of)
Description
Recently, it is gradually raised necessity that thickness of thin film is measured accurately and managed in industrial circles and medical world. In this study, regarding to the thickness of film which is in opaque object and is beyond distance resolution capacity, thickness measurement was done by MEM-cepstrum analysis of received ultrasonic wave. In measurement results, film thickness which is beyond distance resolution capacity was measured accurately. And within thickness range that don't exist interference, thickness measurement by MEM-ceptrum analysis was impossible
Additional details
Publishing Information
- Journal Title
- Journal of the Korean Society for Nondestructive Testing
- Journal Volume
- 7
- Journal Issue
- 2
- Series
- 12 refs, 11 figs
- Journal Page Range
- p. 27-34
- ISSN
- 1225-7842
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 42102785
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- RESOLUTION; THICKNESS; THIN FILMS; ULTRASONIC WAVES
- Descriptors DEC
- DIMENSIONS; FILMS; SOUND WAVES