Published May 2001
| Version v1
Journal article
Ion beam synthesis of CoSi2: Influence of surface kinetics on nucleation
Creators
Description
The experimentally observed kinetics of CoSi2 precipitate nucleation in Si during Co implantation are compared with the predictions of an analytical model that includes the coupling between absorption/desorption of impurity atoms at the precipitate surface and impurity diffusion from the bulk. The comparison shows that in this system, precipitate nucleation deviates considerably from the thermodynamical form
Additional details
Identifiers
- PII
- S0168583X01005146;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 178
- Journal Issue
- 1-4
- Journal Page Range
- p. 327-330
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 33063039
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABSORPTION; COBALT SILICIDES; DESORPTION; IMPURITIES; ION BEAMS; ION IMPLANTATION; MATHEMATICAL MODELS; NUCLEATION; SURFACE PROPERTIES; SYNTHESIS; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- BEAMS; COBALT COMPOUNDS; ELECTRON MICROSCOPY; MICROSCOPY; SILICIDES; SILICON COMPOUNDS; SORPTION; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2001 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.