Synthesis and characterization of structural and optical properties of single crystalline a-TiO₂ films on MgAl₂O₄(111) substrate

Anatase phase TiO₂ (a-TiO₂) films have been deposited on MgAl₂O₄(111) substrates by the metal organic chemical vapor deposition (MOCVD) method at the substrate temperatures of 500-650°C. The structural analyses showed that the films were highly (004) oriented with tetragonal anatase structure and the epitaxial relationship was given as a-TiO₂(004)||MgAl₂O₄ (111). The sample prepared at 600°C exhibited the best crystallization with a single-crystalline epitaxial film. The average transmittance of every TiO₂ film in the visible range exceeded 90% excluding the influence of the substrate. The morphology and composition of the TiO₂ films have also been studied in detail. (paper)