Published December 1984
| Version v1
Journal article
Production of atomic-oxygen negative-ion beam by positive ion-induced sputtering of semiconductive BaTiO3 ceramic
Creators
- 1. Tokushima Univ. (Japan). Faculty of Engineering
Description
When a semiconductive BaTiO3 ceramic surface is bombarded by a keV positive-ion beam, atomic-oxygen negative ions are emitted from the surface in number several tens of times greater than the numbers of other negative ions and neutrals. The dependence of the number of oxygen negative ions on the angle of incidence, the energy and the mass of the bombarding positive ions was investigated, and the ion yield was estimated to be several times greater than 0.1 for the typical conditions. The significance of this finding on techniques for producting negative ions is discussed. (author)
Additional details
Publishing Information
- Journal Title
- Jpn. J. Appl. Phys., Part 1
- Journal Volume
- 23
- Journal Issue
- 12
- Series
- Jpn. J. Appl. Phys., Part 1.
- Journal Page Range
- 1640-1646
- CODEN
- JAPND
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 17029497
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANGULAR DISTRIBUTION; ANIONS; ARGON IONS; ATOMIC IONS; BARIUM OXIDES; BEAM PRODUCTION; CERAMICS; ENERGY DEPENDENCE; HYDROGEN IONS 3 PLUS; ION BEAMS; OXYGEN IONS; SEMICONDUCTOR MATERIALS; SPUTTERING; TITANATES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; BEAMS; CATIONS; CHALCOGENIDES; CHARGED PARTICLES; DISTRIBUTION; HYDROGEN IONS; IONS; MATERIALS; MOLECULAR IONS; OXIDES; OXYGEN COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS