Published September 2017
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Structure and tribological properties of AlSiN coatings after air annealing
- 1. Belarusian state university, Minsk (Belarus)
- 2. A.V. Luikov institute of heat and mass transfer of national academy of science of Belarus, Minsk (Belarus)
Description
The results of structure and phase composition changes in the AlSiN coatings after air annealing at 400 – 900°C are presented. The AlSiN coatings were formed by magnetron sputtering with nanocrystalline (6 at. % Si) and amorphous (30 at. % Si) structures. Air annealing of the nanocrystalline AlSiN coatings at the temperatures of 400 - 900°C results in SiO2 oxide formation and Al2O3 oxide growth at 800°C. The thermal influence on the amorphous AlSiN films does not change its phase composition. The oside phases formation provides the friction coefficient decrease from 0.5 – 0.6 to 0.2 - 0.3. (authors)
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Additional details
Additional titles
- Original title (Russian)
- Структура и трибологические свойства покрытий AlSiN после термического отжига на воздухе
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 978-985-553-446-5
- Imprint Title
- Interaction of radiation with solids. Proceedings of 12. International conference
- Imprint Pagination
- 483 p.
- Journal Page Range
- p. 420-422
- Report number
- INIS-BY--103
Conference
- Title
- 12. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 12. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 19-22 Sep 2017
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 50011319
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM COMPOUNDS; AMORPHOUS STATE; ANNEALING; COATINGS; CRYSTALS; NITROGEN COMPOUNDS; SILICON COMPOUNDS; TRIBOLOGY
- Descriptors DEC
- HEAT TREATMENTS
Optional Information
- Notes
- 4 refs., 1 tab., 5 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 12. Mezhdunarodnoj konferentsii