Published September 2017 | Version v1
Miscellaneous Open

Structure and tribological properties of AlSiN coatings after air annealing

  • 1. Belarusian state university, Minsk (Belarus)
  • 2. A.V. Luikov institute of heat and mass transfer of national academy of science of Belarus, Minsk (Belarus)

Description

The results of structure and phase composition changes in the AlSiN coatings after air annealing at 400 – 900°C are presented. The AlSiN coatings were formed by magnetron sputtering with nanocrystalline (6 at. % Si) and amorphous (30 at. % Si) structures. Air annealing of the nanocrystalline AlSiN coatings at the temperatures of 400 - 900°C results in SiO2 oxide formation and Al2O3 oxide growth at 800°C. The thermal influence on the amorphous AlSiN films does not change its phase composition. The oside phases formation provides the friction coefficient decrease from 0.5 – 0.6 to 0.2 - 0.3. (authors)

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Part of:
Interaction of radiation with solids. Proceedings of 12. International conference

Additional details

Additional titles

Original title (Russian)
Структура и трибологические свойства покрытий AlSiN после термического отжига на воздухе

Publishing Information

Imprint Place
Minsk (Belarus)
ISBN
978-985-553-446-5
Imprint Title
Interaction of radiation with solids. Proceedings of 12. International conference
Imprint Pagination
483 p.
Journal Page Range
p. 420-422
Report number
INIS-BY--103

Conference

Title
12. International conference 'Interaction of radiation with solids'
Original Conference Title
12. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
19-22 Sep 2017
Place
Minsk (Belarus)

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
50011319
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM COMPOUNDS; AMORPHOUS STATE; ANNEALING; COATINGS; CRYSTALS; NITROGEN COMPOUNDS; SILICON COMPOUNDS; TRIBOLOGY
Descriptors DEC
HEAT TREATMENTS

Optional Information

Notes
4 refs., 1 tab., 5 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 12. Mezhdunarodnoj konferentsii