Scaling laws for dual radio-frequency capacitively coupled discharges

The characteristics of dual radio-frequency capacitively coupled discharges are studied based on a homogeneous analytic model. We are considering a planar plasma device that can be approximated using a one-dimensional model. A set of equations describing the dynamics of the system are presented and used to give the analytic scaling laws. Scaling laws relating the drive frequencies and the applied voltages of dual radio-frequency sources to operating functions such as plasma density and plasma potential are examined and compared with numerical simulations