Published 1990 | Version v1
Book

YBa2Cu3O7-x thin films prepared by multilayer deposition

  • 1. Arizona Univ., Tucson, AZ (United States). Dept. of Physics

Description

Various sputtering techniques have been developed for depositing YBa2Cu3O7-δ thin films. In this paper the authors report details of a multilayer deposition technique using a combination of sputtering and evaporation, followed by an ex situ furnace annealing

Additional details

Publishing Information

Publisher
Materials Research Society.
Imprint Place
Pittsburgh, PA (United States)
ISBN
1-55899-057-7
Imprint Title
High-temperature superconductors: Fundamental properties and novel materials processing
Imprint Pagination
1322 p.
Journal Page Range
p. 683-686.

Conference

Title
Materials Research Society fall meeting.
Dates
27 Nov - 2 Dec 1989.
Place
Boston, MA (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
23018665
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; BARIUM OXIDES; COPPER OXIDES; DEPOSITION; EVAPORATION; SPUTTERING; THIN FILMS; YTTRIUM OXIDES
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COPPER COMPOUNDS; FILMS; HEAT TREATMENTS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS

Optional Information

Secondary number(s)
CONF-891119--.