Atomic layer deposition of MgO films on yttria-stabilized zirconia microtubes

Deposition of MgO thin film on nanocrystalline yttria-stabilized zirconia microtubes was investigated. The microtubes were prepared by self-formation from threads drawn directly from zirconium butoxide [Zr(OBu)₄] precursor and heat treated at 800 °C. The tubes possessed 100% tetragonal phase, their typical outer diameter was 50 μm, inner diameter 30 μm and length 1 cm. MgO films were deposited from β-diketonate-type precursor 2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220 °C by atomic layer deposition. Thickness of MgO film on microtubes was 15.8 nm and growth rate 0.105 Å/cycle. - Highlights: • MgO films were deposited on the surface of yttria-stabilized zirconia microtubes. • The studies are carried out on the basis of surface modification of microtubes. • Films were deposited from β-diketonate-type precursor Mg(thd)₂. • The growth temperature of MgO film was 220 °C